Sequential microfabrication process and experimental realization of the proposed quad-band RF MEMS reconfigurable antenna on an LCP substrate: (a) substrate preparation, (b) gold metallization, (c) ...
We present a lithography-free shadow masking technique for post-release metallization of Micro-Electromechanical System (MEMS) devices using Two-Photon Polymerization (2PP). High-resolution polymer ...
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