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台积电宣布:1.4nm制程无需High NA EUV技术,持续优化Low NA路线
在荷兰阿姆斯特丹,台积电的一位高层近日于公司2025年技术论坛欧洲场活动中发表了一项引人关注的观点。资深副总经理兼副联席首席运营官张晓强指出,对于当前最尖端的制程技术,引入High NA EUV(极紫外光刻)技术并非当务之急。
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