["uitable","table_dlgexpr_2_1","k_ht_x","CellEditCallback",[]], ["uitable","table_dlgexpr_3_1","k_ht_yz","CellEditCallback",[]], ["uitable","table_dlgexpr_2_2","2 2 2 ...

{"meta":{"app":"FEATool Multiphysics","author":"Precise Simulation","build":"1.9.0","date":"19-Feb-2020","descr":["This is an example of modeling anisotropic heat ...

Abstract: This paper presents a MEMS pressure sensor based on the piezoresistive effect, designed for medium-to-low pressure applications such as automotive tire pressure monitoring. Through ...

Abstract: For practical application in a telecommunications system, optical switch modules using MEMS mirror devices should be mechanical-vibration-proof, which is a fundamental environmental ...

在各类惯性传感器中，加速度计因能够测量加速度和振动而具有重要地位，尤其是MEMS加速度计已成为传统加速度计的重要替代方案。将机械运动或加速度转换为电信号的方法有多种，例如压阻式、压电式、热式和电容式等转换机制。相比其它类型，电容式加速度 ...